• DocumentCode
    3649497
  • Title

    Analysis of aerodynamics and charging of nanoparticles in the gas aggregation source based on a planar magnetron

  • Author

    Jaroslav Kousal;Oleksandr Polonskyi;Pavel Solar;Hynek Biederman;Josef Blažek;Petr Bartoš

  • Author_Institution
    Charles University, Faculty of Mathematics and Physics, V Holeš
  • fYear
    2012
  • fDate
    7/1/2012 12:00:00 AM
  • Abstract
    A single stage gas aggregation cluster and nanoparticle source based on a planar magnetron (Haberland type) was designed and characterized1. Such source produces a beam of neutral, positively and negatively charged particles, that are dragged by a buffer gas expanding from the aggregation chamber. In this work, sizes, speeds and charges of nanoparticles have been studied.
  • Keywords
    "Nanoparticles","Mathematical model","Plasmas","Electrostatics","Numerical models","Predictive models","Educational institutions"
  • Publisher
    ieee
  • Conference_Titel
    Plasma Science (ICOPS), 2012 Abstracts IEEE International Conference on
  • ISSN
    0730-9244
  • Print_ISBN
    978-1-4577-2127-4
  • Type

    conf

  • DOI
    10.1109/PLASMA.2012.6383884
  • Filename
    6383884
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3649497