3651056

Vibrational Properties of Si-N and Si-H in a-Si:(H,N) alloys

Shu-Ya Lin

1993

6/15/1905 12:00:00 AM

101

"Frequency","Atomic layer deposition","Substrates","Temperature","Semiconductor films","Glow discharges","Bonding forces","Chaos","Physics","Amorphous silicon"

ieee

Semiconductor Modeling & Simulation, 1993. SMS Technical Digest. 1993 Symposium on

0-7803-1225-2

conf

10.1109/SMS.1993.664575

664575