DocumentCode
3651206
Title
Resonant cavity coupled infrared detectors with high detectivity operating at room temperature
Author
Anand S. Gawarikar;Ryan P. Shea;Joseph J. Talghader
Author_Institution
Dept. of Electr. Eng., Univ. of Minnesota, Minneapolis, MN, USA
fYear
2013
Firstpage
57
Lastpage
58
Abstract
A spectrally selective uncooled long wave infrared detector with peak detectivity between 3×109 cm Hz1/2/W and 4.4×109 cm Hz1/2/W is reported. The detector is fabricated using silicon microfabrication techniques and integrates a thermoelectric readout with a resonant optical cavity to achieve wavelength selective absorption.
Keywords
"Detectors","Cavity resonators","Absorption","Noise","Temperature measurement","Optical filters","Optical detectors"
Publisher
ieee
Conference_Titel
Optical MEMS and Nanophotonics (OMN), 2013 International Conference on
ISSN
2160-5033
Print_ISBN
978-1-4799-1512-5
Electronic_ISBN
2160-5041
Type
conf
DOI
10.1109/OMN.2013.6659057
Filename
6659057
Link To Document