Title :
Resonant cavity coupled infrared detectors with high detectivity operating at room temperature
Author :
Anand S. Gawarikar;Ryan P. Shea;Joseph J. Talghader
Author_Institution :
Dept. of Electr. Eng., Univ. of Minnesota, Minneapolis, MN, USA
Abstract :
A spectrally selective uncooled long wave infrared detector with peak detectivity between 3×109 cm Hz1/2/W and 4.4×109 cm Hz1/2/W is reported. The detector is fabricated using silicon microfabrication techniques and integrates a thermoelectric readout with a resonant optical cavity to achieve wavelength selective absorption.
Keywords :
"Detectors","Cavity resonators","Absorption","Noise","Temperature measurement","Optical filters","Optical detectors"
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2013 International Conference on
Print_ISBN :
978-1-4799-1512-5
Electronic_ISBN :
2160-5041
DOI :
10.1109/OMN.2013.6659057