• DocumentCode
    3652305
  • Title

    Mechanical properties of few layer graphene cantilever

  • Author

    Kazuma Matsui;Akira Inaba;Yuta Oshidari;Yusuke Takei;Hidetoshi Takahashi;Tomoyuki Takahata;Reo Kometani;Kiyoshi Matsumoto;Isao Shimoyama

  • Author_Institution
    Grad. Sch. of Inf. Sci. &
  • fYear
    2014
  • Firstpage
    1087
  • Lastpage
    1090
  • Abstract
    We report the resonant frequency measurement of few-layer (1-, 2-, and 3-layer) graphene (FLG) cantilevers by optical heterodyne interferometry. The micro-sized FLG cantilevers with and without the diamond-like carbon weights were fabricated using focused ion beam. The Young´s modulus was able to be calculated from the measured resonant frequency. The calculated Young´s modulus was larger than the literature data [1]. This result suggests that the overlapped structure of the FLG cantilever makes the structure rigid.
  • Keywords
    "Graphene","Resonant frequency","Frequency measurement","Weight measurement","Optical variables measurement","Equations","Mathematical model"
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2014.6765834
  • Filename
    6765834