DocumentCode
3652305
Title
Mechanical properties of few layer graphene cantilever
Author
Kazuma Matsui;Akira Inaba;Yuta Oshidari;Yusuke Takei;Hidetoshi Takahashi;Tomoyuki Takahata;Reo Kometani;Kiyoshi Matsumoto;Isao Shimoyama
Author_Institution
Grad. Sch. of Inf. Sci. &
fYear
2014
Firstpage
1087
Lastpage
1090
Abstract
We report the resonant frequency measurement of few-layer (1-, 2-, and 3-layer) graphene (FLG) cantilevers by optical heterodyne interferometry. The micro-sized FLG cantilevers with and without the diamond-like carbon weights were fabricated using focused ion beam. The Young´s modulus was able to be calculated from the measured resonant frequency. The calculated Young´s modulus was larger than the literature data [1]. This result suggests that the overlapped structure of the FLG cantilever makes the structure rigid.
Keywords
"Graphene","Resonant frequency","Frequency measurement","Weight measurement","Optical variables measurement","Equations","Mathematical model"
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on
Type
conf
DOI
10.1109/MEMSYS.2014.6765834
Filename
6765834
Link To Document