A versatile setup for semiconductor testing up to 550/spl deg/C

We describe a novel setup designed for measuring semiconductor devices at temperatures up to 550/spl deg/C and report on some promising early measurements of a 1 /spl mu/m MOSFET in the range from room temperature to 400/spl deg/C. The high-temperature setup comprises a custom built, vacuum tight tube oven, a motor driven loading system, and a specially designed sample holder. Our first measurements demonstrate the reliability of our new method to contact the sample trough a ceramic substrate used as an interconnect between spring loaded pins and the micro-chip.