DocumentCode :
3652639
Title :
Direct laser writing with variable repetition rate
Author :
J. Fischer;J. Müller;J. Kaschke;M. Wegener
Author_Institution :
Inst. fur Nanotechnol., Karlsruhe Inst. of Technol. (KIT), Karlsruhe, Germany
fYear :
2013
fDate :
6/1/2013 12:00:00 AM
Firstpage :
1
Lastpage :
2
Abstract :
We perform femtosecond direct laser writing at repetition rates between 1 kHz and 80 MHz. From the observed weak dependence of the threshold power on the repetition rate, we conclude that no fundamentally different structuring regimes exist.
Keywords :
"Polymers","Resists","Explosions","Writing","Absorption","Chemical lasers"
Publisher :
ieee
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2013 Conference on
ISSN :
2160-8989
Type :
conf
DOI :
10.1364/CLEO_SI.2013.CM4H.5
Filename :
6833278
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3652639
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