Characterization of micromachined CMOS transmission lines for RF communications

This work reports on the analytical and experimental characterization of micromachined microwave transmission lines used in RF communication applications. New analytic approximations are derived for the quasi-static capacitance of coplanar transmission lines with finite metallization thickness. The expressions are well suited for CAD applications since they are compact and scalable. Furthermore, their accuracy is comparable with the fabrication tolerances and measurement accuracy achievable.