Title :
Pixel sensor guard-ring geometry optimization by TCAD simulation
Author :
Fay?al Hadj Larbi;Slimane Oussalah;Nabila Belkhelfa;Abdenour Lounis
Author_Institution :
Microelectronics and Nanotechnology Division Centre de D?veloppement des Technologies Avanc?es, Algeria
Abstract :
This paper presents a new approach of designing a n-in-n ATLAS pixel sensor shape inspired form golden ratio by using the golden ratio in the design of the multi guard rings structure. A new configuration is proposed in the goal of optimizing its layout parameter. The performance of the optimized guard rings structure is evaluated with TCAD simulation. It´s shown that the optimized structure related to the guard ring designed with the golden ration leads to the high breakdown voltage. The breakdown behavior of the guard ring structure is studied as a function of the golden ration applied to the guard ring parameters, like the width implant, metal width and overhang.
Keywords :
"Silicon","Structural rings","Detectors","Metals","Electric breakdown","Geometry","Optimization"
Conference_Titel :
Microelectronics (ICM), 2014 26th International Conference on
Electronic_ISBN :
2159-1679
DOI :
10.1109/ICM.2014.7071798