Title :
Development model of research sample surface with piezoresistive deflection registration of cantilever beam
Author :
Bohdan Dupak;Mykhaylo Lobur;Roman Ivantsiv
Author_Institution :
CAD Department, Lviv Polytechnic National University, UKRAINE, S. Bandery street 12
Abstract :
In this paper the model of research sample surface with registration piezoresistive deflection of beam cantilever mechanical type under ultrasonic acoustic wave.
Keywords :
"Structural beams","Acoustic beams","Acoustics","Piezoresistance","Laser beams","Surface topography","Surface treatment"
Conference_Titel :
Experience of Designing and Application of CAD Systems in Microelectronics (CADSM), 2015 13th International Conference The
DOI :
10.1109/CADSM.2015.7230796
