Title :
A new optical silicon MEMS pressure sensor with computer-aided detection
Author :
Katarzyna Sare?o;A. G?recka-Drzazga;Jan Dziuban;Danylo Lizanets
Author_Institution :
Electronic Microsystems and Photonic Department, Wroclaw University of Technology, POLAND, Wroc?aw, Janiszewskiego street 11/17
Abstract :
A new optical MEMS silicon pressure sensor for use in high temperature (up to 450°C) and high radiation environments has been developed. Preliminary tests of the pressure sensor integrated with the components of the optical detection system and software has showed accurate detection of pressure by purely optical system.
Keywords :
"Software","Optical reflection","Optical sensors","Biomedical optical imaging","Silicon","Micromechanical devices"
Conference_Titel :
Experience of Designing and Application of CAD Systems in Microelectronics (CADSM), 2015 13th International Conference The
DOI :
10.1109/CADSM.2015.7230804
