Title :
VHDL-AMS model of MEMS capacitive accelerometer with delta-sigma A/D converter for behavioral level design
Author :
Andriy Holovatyy;Vasyl Teslyuk
Author_Institution :
Software Engineering Department, Ternopil Ivan Pul´uj National Technical University, UKRAINE, Ruska street 56
Abstract :
In the paper, VHDL-AMS model of MEMS capacitive accelerometer with delta-sigma analog to digital converter (ADC) has been developed. The proposed model allows to simulate capacitance changes, change of output voltage of the sensor, digitizing the output signal from the sensor using delta-sigma A/D converter depending on the applied acceleration. The model can be used to conduct the analysis of the device at the behavioral level of computer-aided design.
Keywords :
"Micromechanical devices","Accelerometers","Computational modeling","Solid modeling","Acceleration","Mathematical model","Design automation"
Conference_Titel :
Experience of Designing and Application of CAD Systems in Microelectronics (CADSM), 2015 13th International Conference The
DOI :
10.1109/CADSM.2015.7230865
