• DocumentCode
    3655947
  • Title

    VHDL-AMS model of MEMS capacitive accelerometer with delta-sigma A/D converter for behavioral level design

  • Author

    Andriy Holovatyy;Vasyl Teslyuk

  • Author_Institution
    Software Engineering Department, Ternopil Ivan Pul´uj National Technical University, UKRAINE, Ruska street 56
  • fYear
    2015
  • Firstpage
    313
  • Lastpage
    315
  • Abstract
    In the paper, VHDL-AMS model of MEMS capacitive accelerometer with delta-sigma analog to digital converter (ADC) has been developed. The proposed model allows to simulate capacitance changes, change of output voltage of the sensor, digitizing the output signal from the sensor using delta-sigma A/D converter depending on the applied acceleration. The model can be used to conduct the analysis of the device at the behavioral level of computer-aided design.
  • Keywords
    "Micromechanical devices","Accelerometers","Computational modeling","Solid modeling","Acceleration","Mathematical model","Design automation"
  • Publisher
    ieee
  • Conference_Titel
    Experience of Designing and Application of CAD Systems in Microelectronics (CADSM), 2015 13th International Conference The
  • Type

    conf

  • DOI
    10.1109/CADSM.2015.7230865
  • Filename
    7230865
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3655947