Title :
Development of UML diagrams to improve production cantilevers of mechanical type
Author :
Bohdan Dupak;Halia Kovalchuk;Pavlo Denysyuk;Tetyana Melnyk
Author_Institution :
CAD Dept., Lviv Polytech. Nat. Univ., Lviv, Ukraine
Abstract :
This paper discusses and highlights the principle of operation, use, production and composition cantilevers mechanical type.
Keywords :
"Force","Atomic force microscopy","Probes","Structural beams","Silicon"
Conference_Titel :
Experience of Designing and Application of CAD Systems in Microelectronics (CADSM), 2015 13th International Conference The
DOI :
10.1109/CADSM.2015.7230908
