A field-based parasitic capacitance model with 3-D terminal and terminal fringe components

In this paper, a parasitic capacitance model for a single three-dimensional (3-D) wire above a plate is developed. The model decomposes electric field into various regions and gives solutions to each part. The total capacitance is the summation of all capacitance parts corresponding to the electric field distribution. The model´s physical base minimizes its complexity and error comparing to a traditional empirical fitting process. Verified by extensive COMSOL simulations, the model can accurately predict parasitic capacitance for a wide range of BEOL wire dimensions. Thus, it holds potential to be further investigated for circuit simulation and design.