Title :
Silicate overcoat layers for the improvement of PECVD SiO2 optofluidic waveguides
Author :
Matthew A. Stott;Thomas A. Wall;Erik Hamilton;Roger Chu;Aaron R. Hawkins;Damla Ozcelik;Joshua W. Parks;Gopikrishnan G. Meena;Holger Schmidt
Author_Institution :
Department of Electrical and Computer Engineering, Brigham Young University, Provo, Utah 84602, United States
Abstract :
Silicate spin-on-glass can be used as a protective barrier to coat PECVD SiO2 optofluidic waveguides in order to smooth out surface topology, and lessen moisture absorption on top of the waveguide. The measured optical throughput and mode confinement improved when compared to uncoated waveguides.
Keywords :
"Optical waveguides","Optical refraction","Optical variables control","Throughput","Films","Temperature measurement","Optical device fabrication"
Conference_Titel :
Circuits and Systems (MWSCAS), 2015 IEEE 58th International Midwest Symposium on
DOI :
10.1109/MWSCAS.2015.7282085
