Design and modeling of a miniaturized long stroke optical micro scanner

This paper presents the design and finite element modeling of a miniaturized long stroke optical micro scanner. The concept mechatronic design of the device is introduced. A kind of finite element modeling technique based on modal analysis is utilized to bridge the gap between the state space servo model and the mechanical structural geometric parameters of the designed scanner. The eigenvalues and the eigenvectors of the first 20 modes of the scanner are calculated with ANSYS. A 40^th order 2 inputs 3 outputs state space model is built by using the eigenvalues and the eigenvectors given by ANSYS. Balanced truncation model reduction method is utilized to reduce the orders of the state space model. A 10^th order 2 inputs 3 outputs state space model is obtained. Frequency responses comparison between different models is conducted. The comparison results show that the 10^th order 2 inputs 3 outputs state space model can efficiently characterize the vibration and the cross coupling dynamics of the designed miniaturized long stroke optical micro scanner within the frequency range below 500 Hz.