Title :
Rib microring resonators in lithium niobate on insulator
Author :
Siew Shawn Yohanes;Soham Sataparno Saha;Mankei Tsang;Aaron James Danner
Author_Institution :
Department of Electrical and Computer Engineering, National University of Singapore, Singapore
Abstract :
Ridge microring resonators were fabricated via electron beam lithography and ion milling in lithium niobate on insulator (LNOI). LNOI is a single crystalline thin film of lithium niobate bonded to 2μm of SiO2 and a LiNbO3 substrate. Measurement results show a Q-factor of 4,000 as well as a propagation loss in the waveguide of 5.3dB/cm.
Keywords :
"Optical waveguides","Optical resonators","Lithium niobate","Optical device fabrication","Electron beams","Optical variables measurement","Insulators"
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2015 International Conference on
Print_ISBN :
978-1-4673-6834-6
Electronic_ISBN :
2160-5041
DOI :
10.1109/OMN.2015.7288825
