• DocumentCode
    3667331
  • Title

    Cantilever array oscillators with nonlinear optical readout

  • Author

    Sevil Zeynep Lulec;Ulas Adiyan;Goksen G. Yaralioglu;Yusuf Leblebici;Hakan Urey

  • Author_Institution
    Koc University, Istanbul, TURKEY
  • fYear
    2015
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    MEMS array oscillators typically require a separate detector and feedback loop for each oscillator. We show that grating-based-optical-readout induces nonlinearity, which enables simultaneous operation of an array-of-oscillators using only one detector and single electronic feedback-loop.
  • Keywords
    "Oscillators","Resonant frequency","Diffraction","Arrays","Optical feedback","Micromechanical devices","Diffraction gratings"
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMS and Nanophotonics (OMN), 2015 International Conference on
  • ISSN
    2160-5033
  • Print_ISBN
    978-1-4673-6834-6
  • Electronic_ISBN
    2160-5041
  • Type

    conf

  • DOI
    10.1109/OMN.2015.7288835
  • Filename
    7288835
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3667331