Title :
Ultra-high Q silicon resonators in planarized LOCOS
Author :
Alex Naiman;Boris Desiatov;Liron Stern;Noa Mazurski;Joseph Shappir;Uriel Levy
Author_Institution :
Applied Physics department, The Hebrew University of Jerusalem, Israel
Abstract :
We describe a modified local oxidation of silicon process as a platform for the fabrication of waveguides and ultra-high Quality factor (5.3) silicon resonators, with nearly fully planar interface for multilayer silicon integration.
Keywords :
"Silicon","Optical resonators","Q-factor","Optical waveguides","Optical surface waves","Fabrication","Photonics"
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2015 International Conference on
Print_ISBN :
978-1-4673-6834-6
Electronic_ISBN :
2160-5041
DOI :
10.1109/OMN.2015.7288843
