Title :
Experimental demonstration of CMOS-compatible long-range dielectric-loaded surface plasmon-polariton waveguides (LR-DLSPPWs)
Author :
Roy Zektzer;Boris Desiatov;Noa Mazurski;Uriel Levy;Sergey I. Bozhevolnyi
Author_Institution :
Department of Applied Physics, The Benin School of Engineering and Computer Science, The Center for Nanoscience and Nanotechnology, The Hebrew University of Jerusalem, 91904, Israel
Abstract :
We demonstrate the design, fabrication and experimental characterization of long-range dielectric-loaded surface plasmon-polariton waveguides (LR-DLSPPWs) that are compatible with complementary metal-oxide semiconductor (CMOS) technology. The demonstrated waveguides feature good mode confinement together with long propagation at telecom wavelengths.
Keywords :
"Optical waveguides","Plasmons","Metals","Strips","Surface waves","Optical device fabrication","Optical surface waves"
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2015 International Conference on
Print_ISBN :
978-1-4673-6834-6
Electronic_ISBN :
2160-5041
DOI :
10.1109/OMN.2015.7288844
