Title :
Polycrystalline silicon based photonic crystal Fabry-Perot etalon
Author :
Chong Pei Ho;Prakash Pitchappa;Chengkuo Lee
Author_Institution :
Department of Electrical &
Abstract :
We demonstrated the design, fabrication and characterization of a polycrystalline silicon based photonic crystal Fabry-Perot etalon with a filtered transmission centered at 3.51μm. The high quality factor of 520 shows the possibility for high-resolution applications.
Keywords :
"Mirrors","Q-factor","Silicon","Cavity resonators","Optical filters","Fabrication","Reflection"
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2015 International Conference on
Print_ISBN :
978-1-4673-6834-6
Electronic_ISBN :
2160-5041
DOI :
10.1109/OMN.2015.7288847
