Title :
Liquid mass sensing of glucose in solution with resonating microplates
Author :
Yoav Linzon;Erez David Chubara;Slava Krylov;Rob B. Ilic;Alexander Golberg
Author_Institution :
Faculty of Engineering, Tel Aviv University, Israel
Abstract :
We sense in aqueous environment water solution deposits on thin Silicon-on-Insulator micro-resonator membranes, where distinct discern to different glucose solution components is attained in terms of the flexural vibration mode´s resonant frequency and quality factor.
Keywords :
"Liquids","Micromechanical devices","Optical resonators","Sugar","Optical sensors","Nanoelectromechanical systems"
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2015 International Conference on
Print_ISBN :
978-1-4673-6834-6
Electronic_ISBN :
2160-5041
DOI :
10.1109/OMN.2015.7288851
