Title :
Waveguide grating based SOI MOEMS accelerometer
Author :
M. Balasubramanian;U. Poornalakshmi;Somya Agarwal;Prasant Kumar Pattnaik
Author_Institution :
Department of Electrical and Electronic Engineering, BITS-Pilani, Hyderabad Campus, India
Abstract :
A simulation model of waveguide grating based SOI MOEMS accelerometer is presented. The Bragg wavelength varies linearly with external acceleration up to 5g. This design shows sensitivity of 41.75 nm/g and resolution of 0.012g.
Keywords :
"Accelerometers","Gratings","Optical fibers","Optical ring resonators","Acceleration"
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2015 International Conference on
Print_ISBN :
978-1-4673-6834-6
Electronic_ISBN :
2160-5041
DOI :
10.1109/OMN.2015.7288854
