Title :
High-speed optical interferometry of micro and nanothermal wave propagation induced by current flow in metal interconnect lines
Author :
Lucas N. Taylor;Joseph J. Talghader
Author_Institution :
Department of Electrical and Computer Engineering, University of Minnesota, Minneapolis, United States
Abstract :
Thermal deformation waves in a soda-lime-silica glass substrate were measured using high-speed Hilbert-phase interferometry during interconnect heating and Q-switched Nd:YAG irradiation. 100-microsecond thermal events were captured with 256×256 resolution over a 100 micron square area.
Keywords :
"Heating","Optical interferometry","Cameras","Temperature measurement","Optical pulses","High-speed optical techniques","Glass"
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2015 International Conference on
Print_ISBN :
978-1-4673-6834-6
Electronic_ISBN :
2160-5041
DOI :
10.1109/OMN.2015.7288881
