Title :
Modeling of CMOS-SOI-MEMS thermal antenna for monolithic passive uncooled THz imagers
Author :
Alexander Svetlitza;Tanya Blank;Sara Stolyarova;Igor Brouk;Sharon Bar-Lev;Yael Nemirovsky
Author_Institution :
Dept. of Electrical Engineering, Technion - Israel Institute of Technology, Haifa, Israel
Abstract :
We present modeling and simulations of uncooled passive THz imaging sensor based on a thermal antenna. The 2D CMOS-SOI-MEMS imager pixel array constitutes a frequency selective surface tuned to the desired wavelength band.
Keywords :
"Thermal sensors","Frequency selective surfaces","Absorption","Arrays","Micromechanical devices","Thermal resistance"
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2015 International Conference on
Print_ISBN :
978-1-4673-6834-6
Electronic_ISBN :
2160-5041
DOI :
10.1109/OMN.2015.7288884
