Title :
Row/column addressing of scalable silicon photonic MEMS switches
Author :
Niels Quack;Tae Joon Seok;Sangyoon Han;Wencong Zhang;Richard S. Muller;Ming C. Wu
Author_Institution :
Department of Electrical Engineering and Computer Sciences, University of California, Berkeley, 94720, USA
Abstract :
We present a scalable silicon photonic MEMS switch with an actuation scheme requiring only 2N electrical contacts for an N×N switch matrix. Unit cell size is 145μm × 145μm and switching loss 1.5dB at 1550nm.
Keywords :
"Optical switches","Optical waveguides","Silicon photonics","Optical device fabrication","Optical imaging"
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2015 International Conference on
Print_ISBN :
978-1-4673-6834-6
Electronic_ISBN :
2160-5041
DOI :
10.1109/OMN.2015.7288891
