Title :
An electrostatic two-axis gimbaled mirror scanner with tilted stationary vertical combs fabricated by self-aligned micro-assembly
Author :
Seunghwan Moon;Jaekwon Lee;Dongseong Yang;Joho Yun;Juhun Lim;Jong-Hyun Lee;Min-Joo Gwak;Kyung-Su Kim
Author_Institution :
Gwangju Institute of Science and Technology (GIST), Republic of Korea
Abstract :
An electrostatic two-axis gimbaled mirror scanner was demonstrated using tilted stationary vertical combs and self-aligned micro-assembly. Side stability was enhanced and the optical scan angles were 6.8/15.4 degrees on the slow/fast axes, respectively.
Keywords :
"Biomedical optical imaging","Optical device fabrication","Mirrors","Electrostatics","Optical imaging","Optical reflection"
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2015 International Conference on
Print_ISBN :
978-1-4673-6834-6
Electronic_ISBN :
2160-5041
DOI :
10.1109/OMN.2015.7288892
