Title :
Piezoresistive displacement sensor integrated in resonant varifocal mirror
Author :
K. Nakazawa;T. Sasaki;H. Furuta;J. Kamiya;T. Kamiya;K. Hane
Author_Institution :
Dept. of Nanomechanics, Tohoku University, Sendai, Japan
Abstract :
An electrostatically actuated resonant varifocal mirror with a piezoresistive displacement sensor is reported. The focal length of the varifocal mirror is monitored by the sensor. The device is fabricated from a silicon-on-insulator wafer and a glass wafer. The p-type silicon region which is formed in n-type top silicon layer by boron ion implantation is used as the piezoresistive displacement sensor. The mirror surface profile and sensor signal are measured.
Keywords :
"Mirrors","Piezoresistance","Silicon","Glass","Fabrication","Micromechanical devices","Aluminum"
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2015 International Conference on
Print_ISBN :
978-1-4673-6834-6
Electronic_ISBN :
2160-5041
DOI :
10.1109/OMN.2015.7288895
