DocumentCode
3667393
Title
Two cantilever based sytem for viscosity and density monitoring
Author
Onur Cakmak;Erhan Ermek;Necmettin Kilinc;Goksenin G. Yaralioglu;Hakan Urey
Author_Institution
Koc University, Istanbul, TURKEY
fYear
2015
Firstpage
1
Lastpage
2
Abstract
Viscosity and density measurements in liquids in real-time is challenging. Previous MEMS based approaches use frequency sweeps for the purpose and those methods are slow and not real-time. We show that high precision viscosity and density measurements are possible using two cantilevers with different widths and by tracking their frequencies with a Phase-Locked-Loop in real-time.
Keywords
"Viscosity","Frequency measurement","Density measurement","Liquids","Micromechanical devices","Monitoring","Real-time systems"
Publisher
ieee
Conference_Titel
Optical MEMS and Nanophotonics (OMN), 2015 International Conference on
ISSN
2160-5033
Print_ISBN
978-1-4673-6834-6
Electronic_ISBN
2160-5041
Type
conf
DOI
10.1109/OMN.2015.7288898
Filename
7288898
Link To Document