• DocumentCode
    3667967
  • Title

    Influence of mechanical strain in Si and Ge p-type double gate MOSFETs

  • Author

    M. Moussavou;N. Cavassilas;E. Dib;M. Bescond

  • Author_Institution
    IM2NP, UMR CNRS 7334, Marseille, France
  • fYear
    2015
  • Firstpage
    373
  • Lastpage
    376
  • Abstract
    We theoretically investigate the impact of uniaxial strain in extremely thin Si and Ge p-type double gate transistors. Quantum transport modeling is treated using a 6-band k.p Hamiltonian and the non-equilibrium Green´s function formalism including hole-phonon scattering. Based on this framework we analyze the influence of strain on current characteristics considering different transport directions and gate length´s. The results first confirm the dominance of Ge in long devices (15 nm gate length) for which best electrical performances are obtained for channels along <; 110 > with a uniaxial compressive strain. Situation is reversed for shorter devices (7 nm gate length) where the small effective masses of Ge deteriorate the off-regime of transistors regardless the considered strain. Due to weaker hole-phonon scattering, <; 100 > Si devices with a tensile strain are interestingly found to be more competitive than their <; 110 >-compressive counterparts.
  • Keywords
    "Strain","Silicon","Scattering","Effective mass","Logic gates","MOSFET"
  • Publisher
    ieee
  • Conference_Titel
    Simulation of Semiconductor Processes and Devices (SISPAD), 2015 International Conference on
  • ISSN
    1946-1569
  • Print_ISBN
    978-1-4673-7858-1
  • Type

    conf

  • DOI
    10.1109/SISPAD.2015.7292337
  • Filename
    7292337