Title :
Nano-patterning of single- and bi-level surface-relief gratings using a commercial thermal scanning probe lithography system
Author :
S. Ristic;M. Nannini;P. Grutter;F. Holzner;P. Paul
Author_Institution :
McGill Nanotools Microfab, McGill University, Montreal, Canada
fDate :
6/1/2015 12:00:00 AM
Abstract :
The first commercial thermal scanning probe lithography tool is used for patterning of single- and bi-level surface-relief gratings. A modified tri-layer pattern transfer process is proposed to facilitate the fabrication of bi-level gratings.
Keywords :
"Gratings","Couplers","Probes","Nanolithography","Fiber gratings","Optical fiber couplers"
Conference_Titel :
Photonics North, 2015
DOI :
10.1109/PN.2015.7292463
