Title :
Modelling squeeze film damping in packaged energy harvesters
Author :
Fredrik Ohlsson;Erik Svensson;Cristina Rusu
Author_Institution :
Department of Sensor Systems, Acreo Swedish ICT AB, Box 53071, SE-400 14 Gö
Abstract :
We investigate the effects of fluidic damping on MEMS packaged energy harvesters using numerical simulations in COMSOL Multiphysics. In particular, we compare two models for including squeeze film damping in the case where the harvester is operating close to a wall; an equivalent mass damping based on approximate modal coefficients and the numerical solution of the Reynolds equation in the air gap between the wall and the structure. The models are evaluated on a bridge design harvester intended for automotive applications.
Keywords :
"Damping","Mathematical model","Numerical models","Load modeling","Bridge circuits","Integrated circuit modeling","Micromechanical devices"
Conference_Titel :
Circuit Theory and Design (ECCTD), 2015 European Conference on
DOI :
10.1109/ECCTD.2015.7300115
