Title :
Thin film resistance temperature sensors on GaAs
Author :
T. Lalinsky;I. Hotovy;S. Hascik;Z. Mozolova;J. Kuzmik;D. Pogany
Author_Institution :
Inst. of Electr. Eng., Slovak Acad. of Sci., Bratislava, Slovakia
Abstract :
Thin film resistance temperature sensors on GaAs has been developed as an alternative replacement to the temperature sensing Schottky diodes in the power sensor microsystem. Current-voltage and low frequency noise measurements of the temperature sensor have been carried out to analyze the sensor performances. Better noise performance of the resistance sensors compared to the Schottky one has been found.
Keywords :
"Thin film sensors","Temperature sensors","Gallium arsenide","Low-frequency noise","Schottky diodes","Current measurement","Electrical resistance measurement","Frequency measurement","Noise measurement","Temperature measurement"
Conference_Titel :
Advanced Semiconductor Devices and Microsystems, 1998. ASDAM ´98. Second International Conference on
Print_ISBN :
0-7803-4909-1
DOI :
10.1109/ASDAM.1998.730209
