Title :
A new concept for a monolithically integrated optoelectronic receiver based on a GaAs-PIN-photodiode and a PJBT
Author :
F. Dillmann;P. Brennemann;H. Hardtdegen;M. Marso;M. Loken;P. Kordos;H. Luth;F.J. Tegude;J.M.M. Kwaspen;L.M.F. Kaufmann
Author_Institution :
Inst. fur Schicht- und Ionentech., Forschungszentrum Julich GmbH, Germany
Abstract :
We have developed a new concept for an optoelectronic frontend receiver at 0.85 /spl mu/m wavelength. A GaAs-PIN photodiode is coupled to a Permeable Junction Base Transistor (PJBT). The PJBT is a vertical Junction Field Effect Transistor with a homoepitaxial, heavily p-doped gate whose n-doped GaAs channel is selectively grown. Its layer structure incorporates two p-i-n doped layer structures, so it fits ideally to an integration with a PIN photodiode. The fabrication of the integration is described and results of the single devices, both DC and RF measurements, are presented. The performance of the first integrated receiver show the usefulness of this concept for Optoelectronic Integrated Circuits (OEIC) at bitrates of more than 1 Gbit/s.
Keywords :
"Integrated optoelectronics","Gallium arsenide","Epitaxial growth","Etching","Photodetectors","Lithography","Epitaxial layers","Absorption","PIN photodiodes","Optoelectronic devices"
Conference_Titel :
Advanced Semiconductor Devices and Microsystems, 1998. ASDAM ´98. Second International Conference on
Print_ISBN :
0-7803-4909-1
DOI :
10.1109/ASDAM.1998.730220