Fabrication of plate-laminated waveguide for 350GHz band by silicon process

This paper presents the fabrication of plate-laminated waveguides and cavities for 350GHz band by silicon process where the tolerance is less than several µm. We measure the transmission loss of the waveguide and the Q factors of the cavities, and then estimate the equivalent conductivity. We will also fabricate the plate-laminated waveguide slot array antennas (Y.Miura, J.Hirokawa et al., IEEE Trans. Antennas Propagat., 59, 2011, pp.2844–2851) and show the measured results in the conference.