Title :
Special Section on the 2011 Advanced Semiconductor Manufacturing Conference
Author :
Patterson, Oliver D. ; Werbaneth, Paul ; Eisenbraun, Eric
Author_Institution :
IBM, Hopewell Junction, NY, USA
Abstract :
The six papers in this special section are enhanced versions of papers presented at the 22nd annual Advanced Semiconductor Manufacturing Conference (ASMC), held in Sarasota Springs, NY, in 2011.
Keywords :
Meetings; Semiconductor device manufacture; Special issues and sections;
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on
DOI :
10.1109/TSM.2013.2237951
