A 60 GHz compact high gain and high efficiency Si-based Dielectric Antenna

This paper presents a novel design of compact, planar, high efficiency, and high gain dielectric ring antenna suitable for wireless millimeter wave applications. The design of the antenna makes use of the Si-based integrated technology platform previously developed. The technology platform used only high resistivity Si wafers to integrate all sections of the antenna. The fabrication process is a one-mask process using deep Si etching process to fabricate the whole antenna. The dielectric antenna offer open bandwidth from 50 GHz to 75 GHz and 15.5dB gain at 62.5 GHz with 99.8% radiation efficiency.