• DocumentCode
    3677287
  • Title

    Hydrogenated amorphous silicon photonic devices on synthetic quartz glass substrate

  • Author

    Makoto Okano;Emiko Omoda;Yuriko Maegami;Yuki Atsumi;Youichi Sakakibara;Toshihiro Kamei;Masahiko Mori

  • Author_Institution
    National Institute of Advanced Industrial Science and Technology (AIST), 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, Japan
  • fYear
    2015
  • Firstpage
    37
  • Lastpage
    38
  • Abstract
    We have fabricated hydrogenated amorphous silicon (a-Si:H) photonic devices on a synthetic quartz glass substrate. a-Si:H-wire waveguides, ring resonators, and directional couplers were successfully fabricated using a i-line stepper lithograpy.
  • Publisher
    ieee
  • Conference_Titel
    Group IV Photonics (GFP), 2015 IEEE 12th International Conference on
  • Type

    conf

  • DOI
    10.1109/Group4.2015.7305942
  • Filename
    7305942
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3677287