• DocumentCode
    3677307
  • Title

    Low-loss silicon rectangular waveguides fabricated by anisotoropic wet etching for roughness reduction

  • Author

    Hideo Arimoto;Muhammad K. Husain;Alyssa Prasmusinto;Kapil Debnath;Abdelrahman Al-Attili;Rafidah Petra;Harold M. H. Chong;Graham T. Reed;Shinichi Saito

  • Author_Institution
    Faculty of Physical Sciences and Engineering. University of Southampton, Southampton. SO17 1BJ, UK
  • fYear
    2015
  • Firstpage
    90
  • Lastpage
    91
  • Abstract
    Simple fabrication of low-loss Si/SiO2 waveguides with a flat side wall is proposed. Waveguides oriented to the <;11-2> direction on the Si (110) plane are fabricated by anisotropic wet etching and the lowest propagation loss is 1.4 dB/cm.
  • Keywords
    "Optical waveguides","Silicon","Etching","Optical device fabrication","Propagation losses","Optical losses"
  • Publisher
    ieee
  • Conference_Titel
    Group IV Photonics (GFP), 2015 IEEE 12th International Conference on
  • Type

    conf

  • DOI
    10.1109/Group4.2015.7305962
  • Filename
    7305962
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3677307