DocumentCode
3677327
Title
Graded Ge1−x Snx photodetectors fabricated on Si substrates by rapid melt growth method
Author
Chih-Kuo Tseng;Jia-Jiun Gao;Li-Chuan Weng;Neil Na;Erh-Hao Chen;Ming-Chang M. Lee
Author_Institution
Institute of Photonics Technologies, National Tsing Hua University, Hsinchu, Taiwan, ROC
fYear
2015
Firstpage
125
Lastpage
126
Abstract
Near-infrared absorption at 2000-nm wavelength is observed in a Ge1-xSnx metal-semiconductor-metal (MSM) photodetector on a Si substrate. The device is fabricated by rapid melt growth method with graded Sn concentration up to 5-10%.
Keywords
"Tin","Silicon","Photodetectors","Strips","Substrates","Absorption"
Publisher
ieee
Conference_Titel
Group IV Photonics (GFP), 2015 IEEE 12th International Conference on
Type
conf
DOI
10.1109/Group4.2015.7305982
Filename
7305982
Link To Document