Title :
A compact spiral Mach-Zehnder Interferometer Modulator on SOI process
Author :
Aroutin Khachaturian;Behrooz Abiri;Ali Hajimiri
Author_Institution :
California Institute of Technology, Pasadena, CA, 91125 USA
Abstract :
A compact, spiral Mach-Zehnder Interferometer modulator with 9GHz 3d B-band width has been demonstrated. The spiral MZ1 structure allows for high density integration and reduces the cost by wrapping two 3mm long phase shifters in a 550μm×650μm silicon area.
Keywords :
"Modulation","Spirals","Power transmission lines","Phase shifters","Silicon","Frequency measurement","Transmission line measurements"
Conference_Titel :
Group IV Photonics (GFP), 2015 IEEE 12th International Conference on
DOI :
10.1109/Group4.2015.7305996