Design and analysis of cross-coupled 2 DOFs planar direct drive motor

In this paper, a novel structured planar direct drive motor for use in industrial equipment is proposed. The characteristics are its flat structure compared to conventional 2 Degrees Of Freedom (DOFs) motors and realization of 2 DOFs motion within one device. The structure of the planar motor consists of two sets of coils placed perpendicularly and a check-patterned planar surface of magnets. Two three-phase alternating current are used in each coil sets independently which alternate by the displacement of position. The force combination of the coil sets enables a 2 DOFs motion which is parallel to the planar magnet surface. The working feasibility is clarified through simulations, and verified by experiments.