III-V MOSFETs for Future CMOS

In the last few years, as Si electronics faces mounting difficulties to maintain its historical scaling path, transistors based on III-V compound semiconductors have emerged as a credible alternative. To get to this point, fundamental technical problems had to be solved. Nevertheless, there are still many challenges that need to be addressed before the first non-Si CMOS technology becomes a reality. This paper reviews recent progress as well as challenges of III-V electronics for future logic applications.