• DocumentCode
    3683101
  • Title

    A novel new concept in hybrid alpha ionization systems

  • Author

    Lawrence Levit;Geoffrey Weil

  • Author_Institution
    LBL Scientific, 1865 Monte Sereno Drive Alamo CA 94507, 925-788 2969, USA
  • fYear
    2015
  • Firstpage
    1
  • Lastpage
    5
  • Abstract
    A novel ionizer invention based upon a hybrid alpha and pulsed high voltage bias ionizer is presented. It Places the ionizer in the process chamber and biases it remotely through a plastic window using only fields. It performs very nearly identically to such an ionizer with hard wiring to the source. Because the circuit is a capacitor, the ionizer is automatically balanced so there is no need to adjust the balance.
  • Keywords
    "Discharges (electric)","Fault location","Electrodes","Windows","Ionization","Plastics"
  • Publisher
    ieee
  • Conference_Titel
    Electrical Overstress/Electrostatic Discharge Symposium (EOS/ESD), 2015 37th
  • Type

    conf

  • DOI
    10.1109/EOSESD.2015.7314737
  • Filename
    7314737