Title :
A novel new concept in hybrid alpha ionization systems
Author :
Lawrence Levit;Geoffrey Weil
Author_Institution :
LBL Scientific, 1865 Monte Sereno Drive Alamo CA 94507, 925-788 2969, USA
Abstract :
A novel ionizer invention based upon a hybrid alpha and pulsed high voltage bias ionizer is presented. It Places the ionizer in the process chamber and biases it remotely through a plastic window using only fields. It performs very nearly identically to such an ionizer with hard wiring to the source. Because the circuit is a capacitor, the ionizer is automatically balanced so there is no need to adjust the balance.
Keywords :
"Discharges (electric)","Fault location","Electrodes","Windows","Ionization","Plastics"
Conference_Titel :
Electrical Overstress/Electrostatic Discharge Symposium (EOS/ESD), 2015 37th
DOI :
10.1109/EOSESD.2015.7314737