DocumentCode
3683101
Title
A novel new concept in hybrid alpha ionization systems
Author
Lawrence Levit;Geoffrey Weil
Author_Institution
LBL Scientific, 1865 Monte Sereno Drive Alamo CA 94507, 925-788 2969, USA
fYear
2015
Firstpage
1
Lastpage
5
Abstract
A novel ionizer invention based upon a hybrid alpha and pulsed high voltage bias ionizer is presented. It Places the ionizer in the process chamber and biases it remotely through a plastic window using only fields. It performs very nearly identically to such an ionizer with hard wiring to the source. Because the circuit is a capacitor, the ionizer is automatically balanced so there is no need to adjust the balance.
Keywords
"Discharges (electric)","Fault location","Electrodes","Windows","Ionization","Plastics"
Publisher
ieee
Conference_Titel
Electrical Overstress/Electrostatic Discharge Symposium (EOS/ESD), 2015 37th
Type
conf
DOI
10.1109/EOSESD.2015.7314737
Filename
7314737
Link To Document