• DocumentCode
    3683123
  • Title

    Manufacturing changes air ionization technology

  • Author

    Arnold Steinman

  • Author_Institution
    Electronics Workshop, Dangelmayer Associates, 1321 Walnut Street, Berkeley, California 94709 USA
  • fYear
    2015
  • Firstpage
    1
  • Lastpage
    7
  • Abstract
    Manufacturing has brought increased semiconductor device functionality through smaller geometries, larger wafer sizes, and faster operating speeds, as well as increased disk drive storage density and display sizes. To produce these advanced technologies the use of air ionization for static control has changed. This paper explores new ionization requirements and methods.
  • Keywords
    "Manufacturing","Electrostatic discharges","Ionization","Corona","Production","Automation","Surface treatment"
  • Publisher
    ieee
  • Conference_Titel
    Electrical Overstress/Electrostatic Discharge Symposium (EOS/ESD), 2015 37th
  • Type

    conf

  • DOI
    10.1109/EOSESD.2015.7314759
  • Filename
    7314759
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3683123