DocumentCode :
3687152
Title :
Optimization on the preparation of microfluidic channel using dry film resist
Author :
Firdaus Kamuri;Zurina Zainal Abidin;Nurul Amziah Md Yunus;Mohd Nizar Hamidon;Mohd Hanif Yaacob;Suryani Kamarudin;Siti Zalikha Zhukhi
Author_Institution :
Department of Chemical and Environmental Engineering, Universiti Putra Malaysia, Selangor, Malaysia
fYear :
2015
fDate :
5/1/2015 12:00:00 AM
Firstpage :
11
Lastpage :
15
Abstract :
In this work, microfluidic channel was explored using dry film resist (DFR) method. Many of previous studies used SU-8 and PDMS as the medium to fabricate microfluidic channel for making a microfluidic chamber. Microscope slides were used as the substrate for the applications with bio components since it is inert and stable. The DFR serves to be the spacer to form the channel. Several processes which include cleaning, drying, prebaking, laminating, UV exposure and finally post-baking were involved in channel making. These processes need to be optimized in order to obtain a good chamber. Silicon rubber and UV glue were used to seal the chamber system to prevent any leakages.
Keywords :
"Microfluidics","Substrates","Resists","Films","Glass","Fabrication","Microchannels"
Publisher :
ieee
Conference_Titel :
Smart Sensors and Application (ICSSA), 2015 International Conference on
Type :
conf
DOI :
10.1109/ICSSA.2015.7322501
Filename :
7322501
Link To Document :
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