Title :
Development of short pulse CO2 laser for efficient rare earth plasma extreme ultraviolet sources
Author :
Reiho Amano;Thanh-Hung Dinh;Atsushi Sasanuma;Goki Arai;Yusuke Fujii;Kenichiro Nanto;Akihiko Takahashi;Daisuke Nakamura;Tatsuo Okada;Tetsuya Makimura;Taisuke Miura;Akira Endo;Tomas Mocek;Padraig Dunne;Gerry O´Sullivan;Takeshi Higashiguchi
Author_Institution :
Dept. of Electr. &
Abstract :
We produced a 3-15-ns CO2 laser pulse with 1011 W/cm2 for an efficient extreme ultraviolet (EUV) source by rare earth element of Gd. The EUV emission was observed a sharp spectral structure at 6.79 nm.
Keywords :
"Production","Fabrication","Apertures","Optical switches","Biomedical optical imaging","Stimulated emission"
Conference_Titel :
Photonics Conference (IPC), 2015
DOI :
10.1109/IPCon.2015.7323554