Title :
Dispersion properties of bent silicon nitride waveguides
Author :
Kentaro Furusawa;Norihiko Sekine;Akifumi Kasamatsu;Yoshinori Uzawa
Author_Institution :
National Institute of Information and Communications Technology (NICT), Koganei, Japan
Abstract :
We discuss the dispersion properties of silicon nitride waveguides by taking into account the effect of bending, as relevant to microring resonators. Material dispersion characterized by near-infrared spectroscopic ellipsometry is also presented.
Keywords :
"Ellipsometry","Silicon nitride","Optimization"
Conference_Titel :
Photonics Conference (IPC), 2015
DOI :
10.1109/IPCon.2015.7323613
