• DocumentCode
    3688180
  • Title

    Monolithic Mach-Zehnder Interferometer Modulator in an unmodified CMOS process

  • Author

    Aroutin Khachaturian;Behrooz Abiri;Andy Zhou;Ali Hajimiri

  • Author_Institution
    California Institute of Technology, Pasadena, 91125 USA
  • fYear
    2015
  • Firstpage
    394
  • Lastpage
    395
  • Abstract
    A compact monolithically integrated Mach-Zehnder Interferometer Modulator operating above 1Gbps is demonstrated in an unmodified 180nm CMOS SOI process. This 50μm long structure allows for high density integration of photonics modulators and electrical driver circuitry on a single standard CMOS chip.
  • Keywords
    "Focusing","CMOS integrated circuits"
  • Publisher
    ieee
  • Conference_Titel
    Photonics Conference (IPC), 2015
  • ISSN
    1092-8081
  • Type

    conf

  • DOI
    10.1109/IPCon.2015.7323627
  • Filename
    7323627