• DocumentCode
    3688244
  • Title

    Low-insertion loss submicron Ta2O5 channel waveguide with inverse taper structure

  • Author

    Chung-Lun Wu;Bo-Tsang Chen;Wei-Chen Tien;Yuan-Yao Lin;Ann-Kuo Chu;Yi-Jen Chiu;Chao-Kuei Lee

  • Author_Institution
    Department of Photonics, National Sun Yat-sen University, Kaohsiung 804, Taiwan R. O. C.
  • fYear
    2015
  • Firstpage
    328
  • Lastpage
    329
  • Abstract
    The crack-free and low surface roughness of Ta2O5 film has been deposited by magnetron sputtering technique. The propagation loss of 1.5 dB/cm with the total coupling loss of 3.2 dB for the Ta2O5 based channel waveguide with inverse taper structure has been successfully demonstrated.
  • Keywords
    "Annealing","Magnetic cores","Propagation losses","Magnetic films","Magnetic resonance imaging","Monitoring","Insertion loss"
  • Publisher
    ieee
  • Conference_Titel
    Photonics Conference (IPC), 2015
  • ISSN
    1092-8081
  • Type

    conf

  • DOI
    10.1109/IPCon.2015.7323692
  • Filename
    7323692
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3688244