• DocumentCode
    3688258
  • Title

    Ultrasensivite three dimensional nanoscale chemical imaging

  • Author

    Ilya Kuznetsov;Jorge Filevich;Feng Dong;Mark Woolston;Weilun Chao;Erik H. Anderson;Elliot R. Bernstein;Dean C. Crick;Jorge J. Rocca;Carmen S. Menoni

  • Author_Institution
    Center for Extreme Ultraviolet Science and Technology, Colorado State University, USA
  • fYear
    2015
  • Firstpage
    434
  • Lastpage
    435
  • Abstract
    We demonstrate nano-scale 3-dimensional chemical imaging by extreme ultraviolet laser with 75 nm lateral, 20 nm depth resolution, and 0.01 aM sensitivity. 3D composition images of a single micro-organisms were obtained.
  • Keywords
    Nanoscale devices
  • Publisher
    ieee
  • Conference_Titel
    Photonics Conference (IPC), 2015
  • ISSN
    1092-8081
  • Type

    conf

  • DOI
    10.1109/IPCon.2015.7323706
  • Filename
    7323706