Title :
Ultrasensivite three dimensional nanoscale chemical imaging
Author :
Ilya Kuznetsov;Jorge Filevich;Feng Dong;Mark Woolston;Weilun Chao;Erik H. Anderson;Elliot R. Bernstein;Dean C. Crick;Jorge J. Rocca;Carmen S. Menoni
Author_Institution :
Center for Extreme Ultraviolet Science and Technology, Colorado State University, USA
Abstract :
We demonstrate nano-scale 3-dimensional chemical imaging by extreme ultraviolet laser with 75 nm lateral, 20 nm depth resolution, and 0.01 aM sensitivity. 3D composition images of a single micro-organisms were obtained.
Keywords :
Nanoscale devices
Conference_Titel :
Photonics Conference (IPC), 2015
DOI :
10.1109/IPCon.2015.7323706
